SVT Associates is a world
leading manufacturer of
Molecular Beam Epitaxy
systems and other Thin
Film Deposition Equipment.
leading manufacturer of
Molecular Beam Epitaxy
systems and other Thin
Film Deposition Equipment.
SMART NanoFab MBE System
SMART NanoFab MBE System
Versatile Compact Research System
SVT Associates' SMART NanoFab MBE system is the perfect combination of small footprint and large capability. The table-top UHV chamber includes a series of ports to accommodate a wide selection of deposition sources and process monitoring tools.
SMART NanoFab MBE Applications
- III-V
- II-VI
- II-Oxides
- III-Nitrides
- Multi-Technique Deposition MBE
SMART NanoFab MBE Equipment Options
- Load Lock for rapid sample exchange
- RF Plasma Source
- Deposition Sources
- In-Situ Process Monitoring Tools
Deposition Sources and Monitoring Tools
- Effusion Cells
- RF Plasma Source
- Gas Injection
- RHEED and RHEED Image Analysis Software
- AccuFlux In-Situ Process Monitor
- Quartz Crystal Monitor
- Linear Flux Monitor for Calibration
Technical Documentation
Contact SVTA for more information.