leading manufacturer of
Molecular Beam Epitaxy
systems and other Thin
Film Deposition Equipment.
Training Materials
Product Manuals
Dual Filament Effusion Cell Manual
RF Plasma Source 4.5 Manual
ALD Model 503 Manual
IS4K User Manual
AS Valved Cracker Manual
ROBO Control Manual
NorthStar ALD Operation Manual
MBE Systems
MBE Presentation
MBE 35-3 Brochure
Nitride Brochure
Nitride Presentation
Oxide Brochure
SMART NanoFab MBE
SMART NanoFab MBE Options
Combo Brochure
Atomic Layer Deposition Systems
ALD Model ALD-P-200B
ALD Model ALD-P-100B
ALD Presentation
Pulsed Laser Deposition System
SMART NanoTool PLD
SMART NanoTool PLD Options
Thin Film Process Monitoring
AccuFlux™Process Monitor
AccuFlux™Application Note
AccuTemp™ IS4K Process Monitor
IS4K Monitoring the Growth of Nitride Films on Transparent Sapphire Substrates
IS4K Process Monitor Measurement of GaN Growth Rate as a Function of Substrate Temperature
IS4K White Paper Solving the problems of pyrometry and thickness measurement during MBE and MOCVD
RHEED Image Analysis
In-Situ Cathodoluminescence
In-Situ Cathodoluminescence Application Note